Festkörperelektronik
Forschungsgebiete
Additive and Substractive Direct-writing of 3-dimensional Nanostructures
Magnetologic and sensing devices fabricated by focused electron beam induced deposition (FEBID)
Fabrication of 3-dimensional master stamps for Nanoimprint Lithography (NIL) in soft matter
Electrophysiology of Nerve Cells on Microstructured Multi-Electrode-Arrays
High-k & Future Device Technologies
Microelectronic Device Characterization
Scanning Probe Microscopy on Nanostructures
Silicon Technology